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|a 621.382:620.1
|b SUM
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100 |
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|a Sumib, K. [ed.]
|e ed.by
|9 3693
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110 |
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|b International conference on the science and technology of defect control in semiconductors
|c Yokohama
|d 1989 Sept.17-22
|9 3694
|
245 |
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|a Defects control in semiconductors :
|b proceedings of the conference on the science and technology of defect control in semiconductors, The Yokohama 21st century forum, Yokohama, Japan, Sept. 17-22: 1989
|
490 |
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|v v.1
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653 |
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|a Semiconductors - defect control
|
942 |
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|c REF
|6 _
|
260 |
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|a Amsterdam
|b North-Holland
|c 1990
|9 3695
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|a 0-444-88429-7
|
999 |
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|c 1660
|d 1660
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952 |
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|0 0
|1 0
|2 udc
|4 0
|6 6213826201_SUM
|7 0
|9 6644
|a UL
|b UL
|d 2009-08-31
|o 621.382:620.1 SUM
|p 00041235
|r 2009-08-31
|w 2009-08-31
|y REF
|