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Defects control in semiconductors : proceedings of the conference on the science and technology of defect control in semiconductors, The Yokohama 21st century forum, Yokohama, Japan, Sept. 17-22: 1989

書誌詳細
第一著者: Sumib, K. [ed.] (ed.by)
団体著者: International conference on the science and technology of defect control in semiconductors
フォーマット: Printed Book
言語:English
出版事項: Amsterdam North-Holland 1990
主題:
その他の書誌記述
ISBN:0-444-88429-7