rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Nanolithography and patterning techniques in microelectronics
    sub title: Project Report
  name:
    name part: Bucknall,David,G
    role:
      role term: creator
    role:
      role term: ed.
  name:
    name part: Bucknall, David G.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: enk
    place:
      place term: Cambridge
    place:
      place term: Boca Raton, FL
    publisher: Woodhead Pub.
    publisher: CRC Press
    date issued: c2005
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xiv, 409 p. : ill. ; 24 cm.
  note: edited by David G. Bucknall.
  subject:
    topic: Nanolithography
  classification: 621.3815/31 BUC
  identifier: 1855739313 (Woodhead)
  identifier: 0849334470 (CRC)
  identifier: 1845690907 (ebook)
  identifier: 9781855739314
  identifier: http://www.loc.gov/catdir/toc/fy0607/2006365086.html
  identifier: http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
  related item:
    location:
      url: http://www.loc.gov/catdir/toc/fy0607/2006365086.html
  related item:
    location:
      url: http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
  record info:
    record creation date: 060112
    record change date: 20160323130331.0