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Principles and applications of NanoMEMS physics /
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Series: | Microsystems (Series) ;
v. 15. |
| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
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