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Principles and applications of NanoMEMS physics /
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| Format: | Printed Book |
| Sprache: | English |
| Veröffentlicht: |
Dordrecht, The Netherlands :
Springer,
c2005.
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| Schriftenreihe: | Microsystems (Series) ;
v. 15. |
| Schlagworte: | |
| Online Zugang: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |