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Principles and applications of NanoMEMS physics /

Bibliografiske detaljer
Hovedforfatter: Santos, Héctor J. de los
Format: Printed Book
Sprog:English
Udgivet: Dordrecht, The Netherlands : Springer, c2005.
Serier:Microsystems (Series) ; v. 15.
Fag:
Online adgang:http://www.loc.gov/catdir/toc/ecip0513/2005015829.html
http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html
http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html

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