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Principles and applications of NanoMEMS physics /
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Series: | Microsystems (Series) ;
v. 15. |
| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
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| 100 | 1 | |a Santos, Héctor J. de los. |9 9668 | |
| 245 | 1 | 0 | |a Principles and applications of NanoMEMS physics / |c by Héctor J. De Los Santos. |
| 300 | |a xv, 254 p. : |b ill. ; |c 25 cm. | ||
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| 653 | |a Principles and applications - NanoMEMS physics / | ||
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