Santos, H. J. d. l. (2005). Principles and applications of NanoMEMS physics. Springer.
Chicago Edition CitationSantos, Héctor J. de los. Principles and Applications of NanoMEMS Physics. Dordrecht, The Netherlands: Springer, 2005.
MLA Edition CitationSantos, Héctor J. de los. Principles and Applications of NanoMEMS Physics. Springer, 2005.
Warning: These citations may not always be 100% accurate.