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Defects control in semiconductors: Proceedings of the conference on the science and technology of defect control in semiconductors,...
| フォーマット: | Printed Book |
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| 言語: | English |
| 出版事項: |
Amsterdam
North-Holland Publishing Company
1990
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| 主題: |
| 記述事項: | Conference: Internatioal conference on the science and technology of defect control in semiconductors(1989 Sept. 17-22: Yokohama) |
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| 物理的記述: | v.2 |
| ISBN: | ISBN: |